PRECESS  L-Motion 移位传输门阀

--- SPTVL 系列 （ V74 系列）

The SPTVL Transfer Valve suited for corrosive processes such as etch or CVD, the technology of L-motion of the gate by a single-shaft pneumatic actuator. In a L-motion, the gate is moved vertically into close position – without any contact to the valve body – and in the final movement it is pushed horizontally to the gate seat, with the seal touching the gate seat with a fixed force, related to the connected air pressure. SPTVL 传输阀适用于腐蚀工艺，如蚀刻或 CVD ，通过单轴气动执行器对闸门进行 L 型运动的技术。在 L 型运动中，闸门垂直移动到接近位置 - 不与阀体有任何接触 - 在最后的运动中，它被水平推到闸阀座上，密封件以与连接的气压相关的固定力接触闸阀座。

To minimize particle generation and activation, the gates are fitted with vulcanized seals. This is a highly reliable and more durable sealing solution then a standard O-ring sealing, although standard O-ring sealing is available as an option. The shaft feedthrough is sealed with highly durable metal welded bellows. 为了最大限度地 减少颗粒的产生和 生成 ，闸门配有 阀板配备了硫化密封件 。这是一种高度可靠且更耐用的密封解决方案，而不是标准 O 形圈密封，尽管标准 O 形圈密封可作为选项提供。轴馈入装置采用高度耐用的金属焊接波纹管密封。

In case of power failure, the SPTVL can be mechanically locked in close and open position. 在停电的情况下， SPTVL 可以机械锁定在关闭和打开位置。

Already installed in hundreds of demanding applications in various semiconductor, Solar and Industry production processes, the SPTVL series has proven its outstanding reliability. With a robust design as well as reduced and easy maintenance, the SPTVL series convinces in all aspects. SPTVL 系列已经安装在各种半导体、太阳能和工业生产过程中的数百个要求苛刻的应用中，证明了其出色的可靠性。凭借坚固的设计以及减少和易于维护， SPTVL 系列在各个方面都令人信服。

The SPTVL Transfer Valve is always tailored to customer specifications. Nevertheless, four basic design types are predefined: two valve types with different rear side openings and two insert types with inside or outside chamber valve seat. SPTVL 传输阀始终根据客户规格量身定制。尽管如此，仍预定义了四种基本设计类型：两种具有不同后侧开口的阀类型和两种带内腔或外腔阀座的插入类型。

The valve body material options are aluminum, hard anodized, nickel-plated or stainless steel. Gate and bonnet seals are in FKM or FFKM. Other sealing materials are available on request. 阀体材料选项为铝、硬质阳极氧化、镀镍或不锈钢。闸门和阀盖密封件为 FKM 或 FFKM 。可根据要求提供其他密封材料。

MAIN FEATURES 主要 特征：

Semi standard application(Semi E21- 94 Semi E24-92 Semi- E21.1-1296)

半标准应用（ Semi E21- 94 Semi E24-92 Semi- E21.1-1296 ）

Patented L-motion link and dual shifts without springs in the actuator enable faster 获得 zhuanli 的 L 型运动连杆和执行器中无弹簧的双移位可实现更快的速度

smoother actuation with significantly reduced vibration 驱动更平稳，振动显著减少

Single pneumatic actuator 单个气动执行器

Benefits 优势 ：

Mechanical lock at the close position 关闭位置的机械锁

Welded bellows actuator seal 焊接波纹管驱动器密封件

Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly 阀盖法兰螺栓设计有固定器，可防止螺栓在拆卸时脱落

APPLICATIONS 应用：

• Semiconductor processing 半导体制成

• Plasma Etch, CVD, sputter deposition 刻蚀、 CVD 、溅射沉积

• Manufactu r ing of sola r panels 太阳能电池制 造

• LCD/flat panel process LCD 显示液晶面板制造

• All other cluster vacuum systems 所有真空传输系统

对应 VAT 阀门型号： 04.2 、 04.3 、 05.2 、 05.3 系列 L-MOTION 传输门阀

SPTVL 系列 （ V74 系列） L-Motion 移位 传输门阀订货选项

PRECESS  L-Motion 移位传输门阀 阀技术参数